AR 193nm AOI71°and74°
Published in2022-05-27 01:38:12
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AR Rp<0.3%, Tp>97.8%@193nm for P-pol AOI equal 70°(a)
AR Rp<1.6%, Tp>97.0%@193nm for P-pol AOI equal 74°(b)
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AR Rp<0.3%, Tp>97.8%@193nm for P-pol AOI equal 70°(a)
AR Rp<1.6%, Tp>97.0%@193nm for P-pol AOI equal 74°(b)